| Property | Target | Tolerance | Units |
|---|---|---|---|
| Diameter | 50.8 | +/- 0.3 | mm |
| Thickness, Center Point | 400 | +/- 25 | µm |
| Primary Flat Length | 15.8 | +/- 1 | mm |
| Secondary Flat Length | 8.0 | +/- 1 | mm |
| Surface orientation* | (0001) | +/- 0.25 | deg |
| Bow, Warp | <30 | µm | |
| Total thickness variation | <20 | µm | |
| FWHM (0002, 3mm slit) | <50 | arcsec |
*Off-orientation available