625
Flat
single
double
HBT
Detector
Solar
625
Flat
single
double
LED
LASER
Detector
625
Flat
single
double
LASER
Detector
625
Flat
single
double
HBT
Detector
Solar
625
Flat
single
double
LASER
Detector
625
Flat
single
double
LASER
Detector
Standard Dimensions and Tolerances for 100 mm Diameter InP Wafers
| Property | Target | Tolerance | Units |
|---|---|---|---|
| Diameter | 100 | +/- 0.5 | mm |
| Thickness, Center Point | 625 | +/- 25 | µm |
| Primary Flat Length | 32.5 | +/- 2 | mm |
| Secondary Flat Length | 18 | +/- 2 | mm |
| Flat orientation (standard) | US/EJ | +/- 0.5 | deg |
| Flat orientation (high precision) | US/EJ | +/- 0.02 | deg |
| Surface orientation (standard) | (100)* | +/- 0.3 | deg |
| Surface orientation (high precision) | (100)* | +/- 0.05 | deg |
* Off-orientation available
Standard Dimensions and Tolerances for 3" Diameter InP Wafers
| Property | Target | Tolerance | Units |
|---|---|---|---|
| Diameter | 76.2 | +/- 0.5 | mm |
| Thickness, Center Point | 625 | +/- 25 | µm |
| Primary Flat Length | 22 | +/- 2 | mm |
| Secondary Flat Length | 11 | +/- 2 | mm |
| Flat orientation (standard) | US/EJ | +/- 0.5 | deg |
| Flat orientation (high precision) | US/EJ | +/- 0.02 | deg |
| Surface orientation (standard) | (100)* | +/- 0.3 | deg |
| Surface orientation (high precision) | (100)* | +/- 0.05 | deg |
* Off-orientation available